Rigid Felt for SiC Epitaxy is a high-performance thermal insulation solution specifically engineered for SiC epitaxial growth furnaces in the semiconductor industry.
Made from proprietary short-fiber cured felt, the material provides exceptional insulation efficiency, chemical stability, and long-term durability even under extreme process temperatures.
It consists of a complete set of epitaxial insulation components, including:
- Upper and lower insulation covers
- Semi-annular graphite felt assemblies
packing and delivery
vacuum package
Product feature
- Specially engineered for SiC epitaxial processes
- Unique assembly structure for optimized performance
- Exceptional thermal shock resistance
- High erosion and corrosion resistance in aggressive furnace environments
- Superior thermal insulation properties with thermal conductivity below 0.2 W/(m·K) at 1000°C
Advantage
- Excellent thermal stability and long service life under extreme conditions
- Customizable coating solutions to meet specific process requirements
- Enhanced energy efficiency due to ultra-low thermal conductivity
- Reliable performance in demanding semiconductor manufacturing environments
Product application
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